Lee Subin, Kim Yeong Jae, Yoo Hocheon
Department of Electronic Engineering, Gachon University, Seongnam 13120, Republic of Korea.
Korea Institute of Ceramic Engineering and Technology, Ceramic Total Solution Center, Icheon 17303, Republic of Korea.
Micromachines (Basel). 2024 Jan 22;15(1):164. doi: 10.3390/mi15010164.
With the increase in electronic devices across various applications, there is rising demand for selective carrier control. The split-gate consists of a gate electrode divided into multiple parts, allowing for the independent biasing of electric fields within the device. This configuration enables the potential formation of both p- and n-channels by injecting holes and electrons owing to the presence of the two gate electrodes. Applying voltage to the split-gate allows for the control of the Fermi level and, consequently, the barrier height in the device. This facilitates band bending in unipolar transistors and allows ambipolar transistors to operate as if unipolar. Moreover, the split-gate serves as a revolutionary tool to modulate the contact resistance by controlling the barrier height. This approach enables the precise control of the device by biasing the partial electric field without limitations on materials, making it adaptable for various applications, as reported in various types of research. However, the gap length between gates can affect the injection of the electric field for the precise control of carriers. Hence, the design of the gap length is a critical element for the split-gate structure. The primary investigation in this review is the introduction of split-gate technology applied in various applications by using diverse materials, the methods for forming the split-gate in each device, and the operational mechanisms under applied voltage conditions.
随着各种应用中电子设备的增加,对选择性载流子控制的需求也在不断增长。分裂栅由被分成多个部分的栅电极组成,允许对器件内的电场进行独立偏置。由于存在两个栅电极,这种配置通过注入空穴和电子能够形成p沟道和n沟道。向分裂栅施加电压可控制费米能级,进而控制器件中的势垒高度。这有助于单极晶体管中的能带弯曲,并使双极晶体管能够像单极晶体管一样工作。此外,分裂栅是通过控制势垒高度来调制接触电阻的一种革命性工具。这种方法通过对局部电场进行偏置,能够在不受材料限制的情况下对器件进行精确控制,如各种研究报告所示,使其适用于各种应用。然而,栅极之间的间隙长度会影响用于精确控制载流子的电场注入。因此,间隙长度的设计是分裂栅结构的关键要素。本综述的主要研究内容是介绍通过使用不同材料应用于各种应用的分裂栅技术、在每个器件中形成分裂栅的方法以及施加电压条件下的工作机制。